The present study reports the tribological properties and residual stress of titanium chromium nitride (TiCrN) coatings. Thin films of TiCrN were deposited on tungsten carbide substrates at 400 ◦C in a vacuum of 5 × 10−6 mbar using the cathodic-arc physical vapor deposition technique with chromium variation. X-ray diffraction (XRD) spectroscopy was employed to probe the structures of the deposited thin films. The phase constituent was found to gradually shift from cubic TiN to cubic CrN. Both the hardness and elastic modulus of the sheet changed from 29.7 to 30.9 GPa and 446 to 495 GPa, respectively. The biaxial compressive residual stress after an initial absolute scan in the range of 30–100◦ was determined using XRD (d-sin2ψ method). These mechanical and tribological properties of films were investigated with the help of instrumented nanoindentation and a ball-on-disk tribometer wear test. The wear test indicates that the TiCrN thin film, featuring a Cr/Ti ratio of 0.587, exhibits superior wear resistance and maximum compressive residual stress in comparison to other thin films.
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